Institutional Repository

Browsing by Subject "sacrificial etching"

Browsing by Subject "sacrificial etching"

Sort by: Order: Results:

  • Roy, Rupak Bardhan; Farhanieh, Omid; Ergün, Arif Şanlı; Bozkurt, Ayhan (IEEE-Inst Electrical Electronics Engineers Inc, 2017-07-01)
    The transmit and receive sensitivity of the capacitive micromachined ultrasonic transducer (CMUT) is proportional to the active device capacitance formed by the vacuum gap of the device, and an insulation layer between the ...