Show simple item record

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

dc.contributor.authorDemir, Kazim
dc.contributor.authorÜnlü, Mehmet
dc.date.accessioned2021-01-25T11:32:58Z
dc.date.available2021-01-25T11:32:58Z
dc.date.issued2020-08
dc.identifier.citationDemir, K., and Unlu, M. (2020). Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability. Journal of Microelectromechanical Systems.en_US
dc.identifier.issn1057-7157
dc.identifier.urihttps://ieeexplore.ieee.org/document/9094643
dc.identifier.urihttp://hdl.handle.net/20.500.11851/4062
dc.description.abstractWe present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability, improved performance, and ability to perform unprecedented functions that cannot be achieved using the state-of-the-art semiconductor and optical technologies. In this paper, we discuss the recent progress and future of miniature MEMS-based reconfigurable components and present examples including reconfigurable sources, detectors, metamaterials, and guided-wave components. [2019-0099]en_US
dc.language.isoengen_US
dc.publisherInstitute of Electrical and Electronics Engineers Inc.en_US
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectDetectorsen_US
dc.subjectMicromechanical devicesen_US
dc.subjectDipole antennasen_US
dc.subjectAntenna arraysen_US
dc.subjectMillimeter wave technologyen_US
dc.subjectImagingen_US
dc.subjectIntegrated circuitsen_US
dc.subjectDetectorsen_US
dc.subjectmicroelectromechanical systemsen_US
dc.subjectmetamaterialsen_US
dc.subjectsourcesen_US
dc.subjectterahertzen_US
dc.titleMiniature MEMS: Novel Key Components Toward Terahertz Reconfigurabilityen_US
dc.typereviewen_US
dc.relation.journalJournal of Microelectromechanical Systemsen_US
dc.contributor.departmentTOBB ETU, Faculty of Engineering, Department of Electrical & Electronics Engineeringen_US
dc.contributor.departmentTOBB ETÜ, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümütr_TR
dc.identifier.volume29
dc.identifier.issue4
dc.identifier.startpage455
dc.identifier.endpage467
dc.relation.tubitakinfo:eu-repo/grantAgreement/TÜBİTAK/EEEAG/114E089en_US
dc.contributor.orcidhttp://orcid.org/0000-0002-6594-0904
dc.identifier.wosWOS:000554902800003
dc.identifier.scopus2-s2.0-85085761270
dc.contributor.tobbetuauthorÜnlü, Mehmet
dc.identifier.doi10.1109/JMEMS.2020.2992491
dc.relation.publicationcategoryDiğertr_TR
dc.relation.otherH2020-MSCA-RI under Grant TERA-NANO; 2015 Turkish Academy of Sciences Young Scientist Outstanding Achievement Award Program (TUBA-GEBIP 2015)en_US


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record